Dimensional Measurements in the Nanometric Range
نویسنده
چکیده
Since about 1982 new high resolution and high precision measurement methods have been developed whereas these methods can be used especially for the evaluation of surface topography in the nanometric range. Results of a series of experiments are analysed and discussed. General conclusions can be drawn as very often obtained scanning images looking like atoms topography structure have been misunderstood, because it is very difficult to interpret correctly and properly so many kinds of SPM artefacts in the imaging practice applications.
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